Category
Inorganic phosphorus chemicals

Electronic Grade Phosphorus Trichloride

product details :

Product composition

SPECIFICATIONS

Testing Items

Technical Indicator 6N level

Technical Indicator 7N level

Phosphorus trichloride (POCl3)w/%

99.9

99.9

Purity (based on cations) w/%

99.9999

99.99999

Aluminum(Al)w/(μg/kg)

20

5

Antimony(Sb)w/(μg/kg)

10

3

Arsenic(As)w/(μg/kg)

15

6

Barium(Ba)w/(μg/kg)

10

1

Bismuth(Bi)w/(μg/kg)

10

1

Cadmium(Cd)w/(μg/kg)

10

3

Calcium(Ca)w/(μg/kg)

20

5

Chromium(Cr)w/(μg/kg)

10

1

Cobalt(Co)w/(μg/kg)

10

1

Copper(Cu)w/(μg/kg)

20

2

Gallium(Ga)w/(μg/kg)

1

1

Gold(Au)w/(μg/kg)

1

1

Iron (Fe)w/(μg/kg)

30

5

Lead(Pb)w/(μg/kg)

10

3

Lithium (Li)w/(μg/kg)

10

6

Magnesium(Mg)w/(μg/kg)

10

5

Manganese(Mn)w/(μg/kg)

20

1

Mercury(Hg)w/(μg/kg)

10

5

Nickel(Ni)w/(μg/kg)

10

1

Niobium(Nb)w/(μg/kg)

2

1

Potassium(K)w/(μg/kg)

20

3

Silver(Ag)w/(μg/kg)

1

1

Sodium(Na)w/(μg/kg)

10

5

Tin(Sn)w/(μg/kg)

5

1

Strontium(Sr)w/(μg/kg)

5

1

Titanium(Ti)w/(μg/kg)

5

2

Vanadium(V)w/(μg/kg)

10

2

Zinc(Zn)w/(μg/kg)

5

1

Chromaticity/APHA

5

5

Particles(≥0.3μm)/(individual/mL)

50

50

PACKING
Container: high-purity quartz source bottle, coated high-purity quartz source bottle. Outer packaging: container jacket with thick PVC plastic bag; PE special box with built-in sponge cushion specifications: commonly used specifications are 500ml and 1500ml; Packaging can also be customized according to customer requirements
FUNCTION

Electronic grade phosphorus trichloride emits strong smoke in humid air, reacts violently with water to produce phosphoric acid, and releases hydrogen chloride gas, which decomposes when heated. During the sampling, testing, and handling processes, it is important to take protective measures. Wear protective equipment such as glasses, masks, and rubber gloves when in contact. It is strictly prohibited to come into contact with water, avoid inhaling steam, and avoid contact with skin and mucous membranes. When a leak occurs, it should be treated with sediment or lime. If it has come into contact with the skin, it should be immediately rinsed with plenty of running water.

APPLICATION
Mainly used for N-type doping of chips, it is a liquid phosphorus source for the production of integrated circuits, solar cells, fiber preforms, separation devices, etc. Especially in the chip manufacturing process, electronic grade phosphorus oxychloride is an essential electronic chemical, and it is also a raw material for the production of high-purity phosphate esters.
STORAGE

1. Packaged in quartz material containers. The container is placed in a wooden box or plastic box with foam. Belonging to hazardous chemicals, transportation should be carried out in accordance with the requirements of the dangerous goods transportation regulations. It should be stored in a cool, dry, and well ventilated warehouse, away from fire and heat sources. It should be stored separately from reducing agents, active metal powders, alcohols, etc. The storage area should be equipped with emergency response equipment for leaks and suitable containment materials.